WebDec 1, 1994 · A novel design is presented for a cryogenically cooled multisubstrate sample holder for thin film deposition in high vacuum. The cryogen flows through tubing soldered onto a fixed copper plate, while the substrates are mounted on a separate tray that is supported by a linear/rotary‐motion feedthrough. By lowering the substrate tray into firm … WebA rotating liquid nitrogen cooled substrate holder: In apparatus f. In apparatus for rotating a substrate in a vacuum chamber having an aperture in the top wall of the chamber, there is provided a closure mounted over the aperture, the closure including magnetic means cooperating with a plurality of ferro-fluids sealed intermediate the magnetic means in the …
VST - Substrate Holder
WebSt. Leonards on Sea, East Sussex. TN38 9RT. England. Telephone: +44 (0)1424 850811. E-mail: [email protected]. In vacuum substrate heating, vacuum heating elements, UHV heating, sample heating, hot stages, wafer annealing, UHV wafer heating, ceramic elements, graphite elements, pyrolytic graphite element, PG-PBN elements, … WebDetails. Designed to mount inside the outboard side of the headstock spindle, the Hold Fast™ Vacuum Adapter kit features alluminum connectors mounted on a hollow … switched to branch dev
Rotating liquid nitrogen cooled substrate holder - Sperry …
WebVacuum deposition poses no particular problems except for the high heat loads during thermal vaporization. Generally, the vacuum chamber used for vacuum deposition is … WebSubstrate holders and substrate changes. Substrate exchange happens through the hinged door of a box-style PLD-3000 unit. No flanges or gaskets need to be removed for target changes in any of our PLD systems.Once the system is vented and the door is opened, one set of reflecting shields is removed to expose the substrate spinner … WebSemicore Equipment, Inc. 470 Commerce Way Livermore, CA 94551-5215 USA TEL: 925-373-8201 FAX: 925-373-8202 [email protected] switched to a new branch